摘要
综述了硬质薄膜材料的最新研究状况。硬质薄膜的设计向着多元化、多层膜的方向发展。本征超硬薄膜材料,如:金刚石、C BN、B4C、TiB2、BC4N等的硬度可以达到50～80GPa。纳米超晶格薄膜和纳米晶复合膜两类新的超硬薄膜的硬度分别随超晶格的调制周期减小,纳米晶晶粒尺寸减小而增加,它们的硬度都能达到40～70GPa。最高硬度的薄膜材料nc TiN/a Si3N4采用PCVD方法制备,加载30mN测得塑性硬度(Plas tichardness)H=110GPa;加载70mN,H=80GPa。本综述对硬质薄膜的应用前景做了展望。
The latest progress of hard thin films was reviewed in this article. The multielement and multiplayer is the important developing direction of hard thin film relently. The hardness of intrinsically super hard materials, like Diamond, C-BN, B_4C, TiB_2 and BC_4N etc. can reach 50～80 GPa. The hardness of two new superhard thin films, nanosuperlattice films and nanocrystalline complex films, which can reach the value of 40～70 GPa, increase with the reducing of modulation period and the minimizing grain size of nanocrystalline, respectively. The plastic hardness of nc-TiN/a-Si_3N_4, which possess the highest hardness prepared by PCVD, was measured in a value of 110 GPa at appliedloads of 30 mN, in 80 GPa at a loads of 70mN, respectively. Furthermore, the applied prospection of hard films materials was also discussed in the summary.
出处
《真空》
CAS
北大核心
2003年第6期1-5,共5页
Vacuum
