摘要
简述了椭偏法测量非粗糙面薄膜的折射率和厚度的基本原理,推导出粗糙面薄膜的漫反射椭偏方程,给出了C语言计算程序的流程图,并对实例进行计算。
The principle of ellipsometry, which can be used to measure the reflective index and the thickness of the rough-surface films, is stated in brief. The elliptic equation of diffuse reflection on the rough surface films is deduced and its calculating framework by C is given. With this program, both the refractive index and thickness of Al films are calculated out fast and exactly, and the calculation result is satisfied.
出处
《唐山师范学院学报》
2005年第5期57-59,共3页
Journal of Tangshan Normal University
关键词
椭偏法
粗糙面
直接计算法
ellipsometry
rough surfaces
direct calculation method
