摘要
为了利用可变入射角椭圆偏振光谱仪最佳地测出固体材料的光学常数,我们特别对金膜从理论和实验两方面研究了不同入射波长下入射角的选取对光学常数测量精度的影响,发现对不同的入射波长,在相应的主角下测出的光学常数具有最高的精度,主入射角下测量最佳条件对其它固体材料光学常数的测量同样适用。
In order to obtain the highest precision of optical constant measured by variable-angle scanning ellipsometry, the incident angle dependence of precision for different incident wavelengths for Au film was studied theoretically and experimentally. It was found that the best result can be obtained when the incident angle is chosen to be near the corresponding principal angle for different wavelengths. This optimum measuring condition is also suitable for other materials.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第2期95-104,共10页
Journal of Infrared and Millimeter Waves
基金
国家自然科学基金
国家教委资助项目
关键词
光学常数
测量
精度
椭圆偏振
金膜
optical constant, ellipsometry, measurement precision.
