摘要
在电子束曝光系统中,背散射电子检测器是重要部件之一。本文简要地介绍了该装置的工作原理、功能及检测系统概况,并给出了多种应用举例。
In electron beam exposure system,the backscattered electron detector is oneof the important components.This paper briefly described it's principle,functions and examples of many practical applications.
出处
《电工电能新技术》
CSCD
北大核心
1989年第2期46-50,共5页
Advanced Technology of Electrical Engineering and Energy
