摘要
以散射光理论为基础，研制了非接触式表面粗糙度测量系统，该系统由ＣＣＤ传感器、光学系统和计算机系统构成，其优点是灵敏度高，测量范围宽、精度高，适合于不同加工方法形成的表面，可以实现实时、在线、动态检测和控制．
The noncontact surface roughness measuring system based on lightscattering thcory is made of CCD（Charge Coupled Device）sensor，an optical device anda ∞mputer system. The advanced properties are the high sensitivity and special resolutionwhich give a wide mnge and good accuracy. It is suitable for different type of machinedsurface measurement．Its pote11tial application is to online measurement.
基金
哈尔滨市攻关项目
