摘要
随着机械加工自动化程度的提高 ,对表面粗糙度在线测量提出了越来越高的要求。目前 ,为了提高生产效率和实现生产的自动化 ,生产过程中实时检测愈加受到重视。传统的触针测量法 ,由于测量速度和测量条件的原因 ,不适于在线检测。光学测量方法近年发展很快 ,它是一种非接触测量法。根据测量原理可以归纳为干涉测量法、聚焦测量法、散射测量法、散斑测量法四种。本文重点介绍了这些技术进行表面粗糙度在线测量的原理和目前的研究结果。
The advance in manufacturing automation has created the need to develop in-process measurement of surface roughness.On-line technique for product control and monitor of the manufacturing process is very important to increase of efficiency and automatic production.The traditional stylus method is not suitable for measurements on moving surfaces because of velocity and measuring condition problems.Compared to the stylus method,optical methods are often preferred because it is non-contacting and non-destructive to any surface.The principles of the optical methods mainly rely on the focusing,interference,light-scattering,speckle concepts.This paper introduces theories and results for applying these methods to in-process measurement and analyzes their potential for practical manufacture.
出处
《激光杂志》
CAS
CSCD
北大核心
2004年第3期4-8,共5页
Laser Journal
