摘要
本文介绍了测量精度为±０．００３ｍｍ的ＣＣＤ尺寸自动检测系统的工作原理。详细地讨论了光学系统的设计和远心物镜的结构。并且进行了光学计算和像差校正。给出了像差曲线和实测结果。该仪器具有自动检测精度高、快速和性能可靠等优点。已在工业生产中得到了很好地应用。
This paper introduces the principle of operation for the CCD automatic size control sys-tem with measured precision of ±0.003mm.The optical system design and structure of infinite objec-tive are discussed in all details. The optical calculation and aberration correction are done.The aberra-tion curve and tested results are also given.The instrument has high automatic control precision and speed.Its performance is also reliance.It has been widly used in a production.
出处
《光学技术》
CAS
CSCD
1995年第5期4-6,23,共4页
Optical Technique
关键词
尺寸测量
线阵CCD
远心物镜
光学系统
Size measurment,Lineal array CCD,Infinite objective, Optical system
