摘要
介绍ＣＣＤ尺寸测量光学系统的设计原理．重点分析远心光路中的像点弥散、一维光纤列阵照明系统及利用像点弥散斑评价ＣＣＤ光学系统像质的方法。给出一种ＣＣＤ测量光学系统设计实例及其像质评价结果．
he design principle of an optical system for CCD size measurement is introduced in the paper with the emphasis on the analysis of image point dispersion in telecentric light path, illumination system of one dimension optical fiber array and method of the evaluating image qualityof CCD optical system by use of image point dispersion. A design elampleof optical system for CCD measuring and the result of its image qualityevaluation are given.
出处
《应用光学》
CAS
CSCD
1994年第5期20-24,共5页
Journal of Applied Optics
关键词
CCD
光学系统
光纤列阵
长度测量
CCD, measutemeut, optical system,optical fiber array,imagequality
