摘要
用透射电镜（ＴＥＭ）对大气中火焰法沉积（ＣＦＤ）金刚石薄膜的组织结构进行了分析研究。结果表明，所沉积的金刚石晶体中｛１１１｝面上存在着大量层错及显微孪晶；在｛１１１｝面上晶粒边界处的位错密度较低。此外，在金刚石薄膜中还观察到存在于金刚石颗粒间的非金刚石型碳（Ｃ），即无定形碳及微晶石墨。
Microstructure of diamond films deposited by combustion flame (CFD) in the air was analyzed by transmission electron microscopy(TEM). The result showed that there are stacking faults and microtwins in diamond crystalline, which dominatly exist on {111} planes. Dislocations are also found in the diamond crystalline. There was higher dislocations density in middle of diamond crystalline than that in baundary. Finally the non-diamond type carbon impurities was found between the diamond grains in the diamond film, which are amorphous carbon and / or microcrystalline graphite.
出处
《北京科技大学学报》
EI
CAS
CSCD
北大核心
1995年第3期239-242,共4页
Journal of University of Science and Technology Beijing
关键词
沉积
金刚石
薄膜
显微组织
火焰法
chemical flame, deposition, diamond, microstructure
