摘要
传统辐照总剂量试验的辐射源均采用60Co,对环境危害较大。X射线作为辐射源具有安全、剂量率控制准确等优点,可进行硅片级的测试甚至在线测试,从而大大降低封装、测试、运输的成本,提高研发效率。从辐射机理和辐射对栅氧化层影响的角度深入地论证了用10keVX射线代替60Co作为总剂量试验辐射源的可行性。
The standard radiation source utilized in traditional total dose response radiation test is ()^(60)Co, which is environment- threatening. X-rays, as a new radiation source, has the advantages such as safety, precise control of dose rate, strong intensity, possibility of wafer-level test or even on- line test, which greatly reduce cost for package, test and transportation. This paper discussed the feasibility of X-rays replacing ()^(60)Co as the radiation source, based on the radiation mechanism and the effects of radiation on gate oxide.
出处
《核电子学与探测技术》
CAS
CSCD
北大核心
2005年第3期291-295,共5页
Nuclear Electronics & Detection Technology
基金
电子元器件可靠性物理及其应用技术国家级重点实验室基金资助(51433030404DZ1501)
