摘要
采用脉冲ＴＥＡＣＯ２激光诱发ＳＩＨ４＋ＣＨ４等离子体化学气相反应，合成了粒度分布均匀的纳米ＳｉＣ球型陶瓷粉末，采用傅里叶红外光谱、Ｘ射线衍射、元素分析、透射电子显微镜等多种技术对粉末性能进行了分析，利用光学发射谱技术对反应过程进行了初步研究。
Nanometer SiC ceramic powder has been produced by TEA CO_2 laser inducedSiH_4 + CH_4 plasma chemical reaction. Powder character and property have ben studiedthrough FTIR spectroscopy, X-ray diffraction,elementS analysis and transmution electronmicroscopy technique. In addition, the gac-phase reaction process was discussed with theresult of optical emission spetroscopy.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1994年第6期522-525,共4页
Chinese Journal of Lasers
基金
河北省教委基金
