摘要
提出微光机电(MOEMS)惯性器件技术,对其优势和研究价值进行了理论分析。介绍了国外MOEMS陀螺的工作原理、结构、性能指标及研究状况,初步探讨了微光机电陀螺的应用前景和技术发展途径,以及惯性器件的发展方向。
The technology of micro optical electro-mechanical gyroscope(MOEMS) inertial sensor is presented. Its advantages and research value are analyzed in theory. The principles, structures, performance and present state of the gyroscopes abroad are introduced. The application prospects and technical approaches of the gyroscopes, and the development of inertial sensors are investigated preliminary.
出处
《中国惯性技术学报》
EI
CSCD
2005年第2期85-88,共4页
Journal of Chinese Inertial Technology
