摘要
表面微机械加工技术是实现单片集成微光学系统的一种新方法。本文介绍一种新型的采用微机械加工技术的微型光学加速度计 ,包括设计、关键器件的加工和测试 ,它是基于光线和光闸相互作用引起通光量变化的工作原理。这一微光学加速度计包含一个 2 μm厚的多晶硅光闸 ,光闸采用微弹簧支撑在基片上 ,微弹簧是长度为 2 0 0 μm的多晶硅褶曲梁 ,硅基片和微结构之间所夹的牺牲层采用氢氟酸湿法刻蚀去除。光闸设计为一个质量弹簧系统 ,对加速度力产生响应。
Surface micromachining fabrication process offers a novel approach for realizing micro optical system onto a chip A new Micromachined Micro Optical Accelerometer (MMOA) which relies on the amount change of light flux due to the interaction between a light beam and an optical shutter has been designed, and its key device has been fabricated and tested The MMOA consists of a 2 μm thick polysilicon shutter suspended on the substrate by springs which are 200 μm long polysilicon folded beams The sacrificial layer sandwiched between the silicon substrate and the structure is removed with hydrofluoric acid wet etching The shutter is designed as a mass spring system that moves in response to acceleration force
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2001年第2期162-164,共3页
Chinese Journal of Scientific Instrument
