摘要
谐振腔是MOEMS陀螺的关键器件,由于谐振腔具有相对失调特性,所以传统的调腔是以人工方式进行的。研究并提出了一种新型的可应用于微光机电(MOEMS)陀螺谐振腔的闭环调整方案,完成了基于机器视觉和PZT控制的闭环调整系统及调腔实验,得到了预期的效果,并进行了相关的分析。
As the key element of MOEMS Gyroscope,the resonator has relative maladjustment character.It was adjusted manually in the past.A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator.The closed-loop adjustment system and adjustment experiment are completed.The adjustment system is based on machine vision and PZT control.The result accords with the expectation.
出处
《光学技术》
CAS
CSCD
北大核心
2010年第2期172-175,共4页
Optical Technique
