摘要
针对微机电系统存在的问题,阐述了微摩擦的测试方法以及表面形貌对微机械中摩擦性能的影响,试验研究了表面形貌对介于宏观和微观之间摩擦行为的影响。试验用研磨的方法在硅片表面制作了不同宽度的条纹,通过 UMT微摩擦测试仪研究了在不同速度和载荷下氮化硅陶瓷球和试样间的摩擦行为。试验表明,在硅片上制作出合适的条纹有助于降低摩擦系数,在低载低速下出现了测力梁突然释放弹性变形能的情况,使得摩擦力和载荷不稳定,而且随着表面条纹间距增大,这种现象的频率也越来越高,并通过理论分析解释了这些现象。
Based on the existing problems in MEMS, measurement methods of micro-friction and the impacts of surface topography on friction performance in micro machine were reviewed. With simple experiments, the influence of surface topography on friction behavior in the meso-scale was analyzed. Specimens with different striated surfaces were fabricated on silicon wafers by coated abrasive machining. The frictional behaviors among these specimens and silicon nitride ball at different velocity and load levels were observed by CETR Micro-Tribometer. It is found that suitable striated surface can reduce the coefficient of friction. Also, the phenomenon of elastic energy release of beam can be observed in the situation of low velocity and low load, which occurred more frequently with larger striation and resulted in the unsteadiness of friction and load. Finally, this phenomenon was theoretically analyzed.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2005年第6期542-545,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50135040
50275071)
关键词
微机械
微摩擦
表面形貌
弹性变形
micro machine
micro friction
surface topography
elastic deformation
