摘要
近３０年来，人们在利用光学方法测量润滑膜的厚度方面进行了许多研究，并且提出了一些膜厚测量方法。但是，这些方法在测量纳米级润滑薄膜时却都不同程度地存在着分辨率和精度都低等缺点。因此，根据光干涉法测量膜厚的基本原理提出了相对光强原理，并且经过特定的光路设计，研制了一种ＮＧＹ－２型纳米级润滑膜厚度测量仪．在给定条件下的测试结果表明，这种测量仪具有膜厚测量分辨率和精度都高，以及抗外界光场变化能力强等优点．
For the past three decades,many optical metheds for the measurement of lubricationfilm thickness have been widely studied,and some metheds have been developed. However,themethods usually are not of enough resolution and precision if they are used for measarement ofnanometer lubrication film. According to the basic principles of the optical interference, the presentpaper proposed a method for nanometer lubrication film thickness measurement by using relativelight intensity principle,and had developed a NGY-2 inter ferometer with a special design in lightroute. The measured results under the given working conditions show that the meter is of advantageswith high resolution afid precision, and with high resistance to the variation of the outside light fieldas well.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
1994年第2期175-179,共5页
Tribology
基金
国家自然科学基金
关键词
光干涉法
纳米级润滑膜
厚度测量
optical interferometric method,relative light intensity principle,nanometer lubrication film,thickness measurement
