摘要
介绍了在研制微型红外滤光片中将半导体器件制作工艺与基本ＰＶＤ方法结合而成的掩模分离方法，及其制备微型滤光片和将几种滤光片集成在一起的工艺方法，报道了阶段性研究结果．
The masking and lifting-off method to combine the technology of manufacturing semiconductor devices with the PVD method to prepare the micro-infrared filter is introduced. Also the method of integrating the filters is introduced, The results of the research work are reported.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第2期109-112,共4页
Journal of Infrared and Millimeter Waves
基金
国家自然科学基金
