摘要
简要介绍利用不同波段的微型滤光片和不同响应波段的多元ＨｇＣｄＴｅ红外探测器，叙述了通过精密镶嵌技术组合而成的四波段２１５～２２５μｍ、８４～８９μｍ、１０３～１１３μｍ和１１５～１２５μｍ８８元多元多色探测器的设计原理和特性，以及多元多色探测器的组合工艺，并给出了各个通道的响应光谱特性和探测器的工作性能。研制成功的８８元多色红外探测器每个通道的平均探测率和响应率分别为：Ｄ２．１５～２．２５＝１．２×１０１２ｃｍＨｚ１／２／Ｗ和Ｒ２．１５～２．２５＝５．０×１０６Ｖ／Ｗ，Ｄ８．４～８．９＝７．０×１０１０ｃｍＨｚ１／２／Ｗ和Ｒ８．４～８．９＝１．６×１０４Ｖ／Ｗ，Ｄ１０．３～１１．３＝４．０×１０１０ｃｍＨｚ１／２／Ｗ和Ｒ１０．３～１１．３＝４．３×１０３Ｖ／Ｗ，Ｄ１１．５～１２．５＝３．０×１０１０ｃｍＨｚ１／２／Ｗ和Ｒ１１．５～１２．５＝３．３×１０３Ｖ／Ｗ，文中对这些结果进行了分析和讨论。
Multi\|element and multi\|color HgCdTe detector was obtained. It operates for detection of four wavelength bands which are 2.152.25m, 8.48.9m, 10.311.3m and 11.512.5m. Up to 88 elements with different micro optical filters and response bands was assembled by precise mosaic technology. The design principle and characteristics of the detectors were presented, and the fabrication technology was discussed as well. The response spectra of the four channels and the performance were also given. The average detectivity and responsibility for each channel were D\+*\-\{2.152.25\}=1.210\+\{12\}cmHz\+\{1/2\}/W and R\-\{2.152.25\}=5.010\+6V/W,D\+*\-\{8.48.9\}=7.010\+\{10\}cmHz\+\{1/2\}/W and R\-\{8.48.9\}=1.610\+4V/W,D\+*\-\{10.311.3\}=4.010\+\{10\}cmHz\+\{1/2\}/W and R\-\{10.311.3\}=4.310\+3V/W,D\+*\-\{11.512.5\}=3.010\+\{10\}cmHz\+\{1/2\}/W and R\-\{11.512.5\}=3.310\+3V/W,respectively. Analysis and discussion on these results were given.\=\;
出处
《红外与激光工程》
EI
CSCD
1999年第3期37-40,共4页
Infrared and Laser Engineering
关键词
红外探测器
碲镉汞
多元
多色
Infrared detector\ \ HgCdTe\ \ Multielement\ \ Multicolor
