摘要
以ＣｄＯ、ＳｎＯ＿２粉料作为靶，采用直流溅射方法制得ＣｄＯ、ＳｎＯ＿２双层薄膜元件，比较了ＣｄＯ／ＳｎＯ＿２与ＳｎＯ＿２／ＣｄＯ在性能方面的差异。认为ＣｄＯ／ＳｎＯ＿２的气敏性能较好，并初步探讨了工作温度和膜厚等因素对ＣｄＯ／ＳｎＯ＿２元件的电学性质及气敏特性的影响。
CdO/SnO_2 and SnO_2/CdO bilayerthin films were prepared by d.c.sputtering usingCdO and SnO_2 as targets.Conductance and gas-sensing properties of these bilayer films were measured,and it was found that CdO/SnO_2 bilayerfilms had a better sensitivity to reducing gases compared with that of SnO_2/CdO bilayer films. Effectsof operation temperatures and filrn thickness onconductance and gas-sensing properties of CdO/SnO_2 bilayer films were investigated.
出处
《功能材料》
EI
CAS
CSCD
1994年第3期251-254,共4页
Journal of Functional Materials
基金
国家自然科学基金
