摘要
介绍一种利用厚膜工艺制作的ＳｎＯ２乙醇敏感器件．重点介绍实验方 法；分析了该器件的灵敏度、选择性的特点．证实该方法可制得较高电参数 一致的，高灵敏度、选择性的乙醇敏感器件．
This paper describes experimental method and characteristics of a SnO2 alcohol sensor which is fabricated by thick films technology. The method can improve identity, sensitivity, selectivity and repeatability of alcohol sensors.
出处
《大连理工大学学报》
EI
CAS
CSCD
北大核心
1993年第5期603-607,共5页
Journal of Dalian University of Technology
关键词
气敏器件
厚膜
灵敏度
gas sensitive devices
thick films
sensitivity
selectivity
repeatability
