摘要
通过对周期性Mo/Si多层膜Cu靶K_(?)线小角衍射曲线的分析,并进一步采用对局部曲线进行分步数值拟合的方法,确定了多层膜的结构参数及界面质量。估算了多层膜样品在λ=20nm附近的正入射反射率接近10％。
The structrue of a periodic Mo/Si soft X-ray multilayer is determined through analyses of its small angle diffraction curve and then a numerical curve fitting process. Normal incident reflectance is calculated to be nearly 10% around wavelength 20 nm.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1993年第12期900-905,共6页
Chinese Journal of Lasers
关键词
小角衍射
软X射
多层膜
测量
small angle diffraction, soft X-ray, multilayer
