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Synthesis of One-Dimensional ZnO Na norods by Oxidating Zinc Films Deposited with Magnetron Sputtering 被引量:5

热氧化磁控溅射金属锌膜合成一维ZnO纳米棒(英文)
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摘要 One-dimensional ZnO nanorods are synthesized by ox idating thin metal zinc films deposited on Si(111) substrates with radio frequen cy magnetron sputtering.The crystal structure,surface morphology,and optical pro perties of nanorods are investigated.X-ray diffraction(XRD) pattern,scanning el ectron microscopy(SEM),and transmission electron microscopy(TEM) analyses show t hat the synthesized single-crystal ZnO nanorods develop like hairpins along dif ferent radials,with a hexagonal wurtzite structure.The diameters of nanorods ran ge between 30 and 60nm and lengths up to micrometers.Photoluminescence(PL) analy sis shows that,under 280nm light excitation,a strong and sharp near band-edge U V light emission band at 372nm and a relatively weak green deep-level light emi ssion band at 516nm are observed from the ZnO nanorods,which indicates excellent crystallization and optical quality of the fabricated ZnO nanorods. 利用退火热氧化射频磁控溅射金属锌膜的方法在 Si(111)衬底上制备了一维 Zn O纳米棒 ,同时用多种测试手段对样品的晶体结构、表面形貌和光学性能进行了研究 .XRD,SEM和 TEM的测试结果表明 ,Zn O纳米棒为单晶相六方纤锌矿结构 ,呈头簪状向外发散生长 ,直径在 30~ 6 0 nm左右 ,其长度可达几 μm.PL 谱测试结果表明 :在波长为 2 80 nm光的激发下 ,在 372 nm处有强的近带边紫外光发射和 5 16 nm处的较微弱深能级绿光发射 .说明合成的一维 Zn
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第10期1211-1214,共4页 半导体学报(英文版)
基金 国家自然科学基金重大研究计划资助项目 (批准号 :90 2 0 10 2 5 ,90 3 0 10 0 2)~~
关键词 magnetron sputtering thermal oxidation ZNO nan orods properties 磁控溅射 热氧化 氧化锌 纳米棒 特性
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参考文献7

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