The research of micro-forces between micro-parts forms the base for micro-machine (MEMS) development. According to the characteristics of the interactions between micro-parts in MEMS, three models were simplified. Bas...The research of micro-forces between micro-parts forms the base for micro-machine (MEMS) development. According to the characteristics of the interactions between micro-parts in MEMS, three models were simplified. Based on these models, micro-forces between micro-parts were analyzed, and the analytical formulas were formulated. Factors which may affect the micro-forces, such as surface condition, media and constitutive material of micro-parts were discussed. A coefficient of surface roughness on micro-forces was introduced, which facilitated the analysis of the influence of surface roughness.展开更多
文摘The research of micro-forces between micro-parts forms the base for micro-machine (MEMS) development. According to the characteristics of the interactions between micro-parts in MEMS, three models were simplified. Based on these models, micro-forces between micro-parts were analyzed, and the analytical formulas were formulated. Factors which may affect the micro-forces, such as surface condition, media and constitutive material of micro-parts were discussed. A coefficient of surface roughness on micro-forces was introduced, which facilitated the analysis of the influence of surface roughness.
