A high-precision method of detecting motion straightness was proposed based on the prin- ciple of plane mirror interference after analyzing the motion straightness error of a linear stage. De- tection experiments were...A high-precision method of detecting motion straightness was proposed based on the prin- ciple of plane mirror interference after analyzing the motion straightness error of a linear stage. De- tection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.展开更多
基金Supported by National Defense Basic Scientific Research Project(A222013)High Quality CNC Machine Tool and Basic Manufacturing Equipment Scientific Major Project(2012ZX04010-061)
文摘A high-precision method of detecting motion straightness was proposed based on the prin- ciple of plane mirror interference after analyzing the motion straightness error of a linear stage. De- tection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.
