The surface roughness seriously affects the performance of devices after barrier CMP. Due to the high surface roughness of copper line, the local resistance of a device will be high when working, then the copper line ...The surface roughness seriously affects the performance of devices after barrier CMP. Due to the high surface roughness of copper line, the local resistance of a device will be high when working, then the copper line will overheat prompting the generation of electro-migration and the circuit will lose efficacy. Reducing the surface roughness of the copper line in barrier CMP is still an important research topic. The main factors influencing the surface roughness of copper line in alkaline barrier slurry are analyzed in the paper. Aimed at influencing the law on the surface roughness of copper line, using a new type of alkaline barrier slurry with a different p H of the chelating agent and changing the content of non-ionic surfactant, we then analyze the influencing law both on the surface roughness of copper line, and the influence mechanism. The experimental results show that with a chelating agent with a low p H value in the barrier slurry, the surface roughness of the copper line is 1.03 nm and it is the lowest in all of the barrier slurries, and with the increase of non-ionic surfactant concentration, the surface roughness of copper line is reduced to 0.43 nm, meeting the demand of further development of integrated circuits.展开更多
In recent years, geosynthetic Clay liners (GCLs) are widely used in different kinds of anti-seep-age projects and the anti-seepage availabilities of GCLs are regarded as increasingly important by engineers. Anti-seepa...In recent years, geosynthetic Clay liners (GCLs) are widely used in different kinds of anti-seep-age projects and the anti-seepage availabilities of GCLs are regarded as increasingly important by engineers. Anti-seepage effectiveness of GCLs involves at least two aspects, such as Hydraulic conductivity of GCLs under engi-neering practice conditions, and Absorption ability of bentonite in GCLs in the course of liq-uid permeation. In this paper, Hydraulic con-ductivity tests are performed to obtain seepage coefficient of GCLs, taking liquids such as dis-tilled, deioned water and landfill leachate, and solutions with single-species cation as the hy-dration and permeation liquid. The results Show that cation valence, cation concentration and hydration ionic radius in hydration and permea-tion liquids have influences on hydraulic con-ductivity of GCLs.展开更多
文摘The surface roughness seriously affects the performance of devices after barrier CMP. Due to the high surface roughness of copper line, the local resistance of a device will be high when working, then the copper line will overheat prompting the generation of electro-migration and the circuit will lose efficacy. Reducing the surface roughness of the copper line in barrier CMP is still an important research topic. The main factors influencing the surface roughness of copper line in alkaline barrier slurry are analyzed in the paper. Aimed at influencing the law on the surface roughness of copper line, using a new type of alkaline barrier slurry with a different p H of the chelating agent and changing the content of non-ionic surfactant, we then analyze the influencing law both on the surface roughness of copper line, and the influence mechanism. The experimental results show that with a chelating agent with a low p H value in the barrier slurry, the surface roughness of the copper line is 1.03 nm and it is the lowest in all of the barrier slurries, and with the increase of non-ionic surfactant concentration, the surface roughness of copper line is reduced to 0.43 nm, meeting the demand of further development of integrated circuits.
文摘In recent years, geosynthetic Clay liners (GCLs) are widely used in different kinds of anti-seep-age projects and the anti-seepage availabilities of GCLs are regarded as increasingly important by engineers. Anti-seepage effectiveness of GCLs involves at least two aspects, such as Hydraulic conductivity of GCLs under engi-neering practice conditions, and Absorption ability of bentonite in GCLs in the course of liq-uid permeation. In this paper, Hydraulic con-ductivity tests are performed to obtain seepage coefficient of GCLs, taking liquids such as dis-tilled, deioned water and landfill leachate, and solutions with single-species cation as the hy-dration and permeation liquid. The results Show that cation valence, cation concentration and hydration ionic radius in hydration and permea-tion liquids have influences on hydraulic con-ductivity of GCLs.
