The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision.The main problems of fabricating large-aperture and...The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision.The main problems of fabricating large-aperture and high-precision grating by this technique are the high-precision displacement measurement of the stage,the high-precision control of the interference fringe and the real time compensation of the grating phase error.In this paper,the influence of grating groove error on the wavefront aberration is analyzed.In order to improve the precision of the stage with displacement range more than one meter,an integrated displacement measurement combining grating sensing and laser interferometry is proposed,which suppresses the influence of environment on measurement precision under long displacement range.An interference fringe measurement method is proposed,which combines the diffraction characteristics of the measuring grating with the phase-shifting algorithm.By controlling the direction,period and phase nonlinear errors of the interference fringe,high quality interference fringe can be obtained.Further,a dynamic phase-locking model is established by using heterodyne interferometry to compensate grating phase error caused by stage motion error in real time.A grating with the aperture of 1500mm×420mm is fabricated.The wavefront aberration reaches 0.327λ@632.8 nm and the wavefront gradient reaches 16.444 nm/cm.This research presents a novel technique for the fabrication of meter-level size and nano-level precision holographic grating,which would further promote the development of chirped pulse amplification systems,high-energy laser and ultra-high precision displacement measurement.展开更多
基金supported by National Key R&D Program of China(2022YFB3606100)the National Natural Science Foundation of(62435019,52275554,U21A20509,61227901)+1 种基金CAS Project for Young Scientists in Basic Research(YSBR-103)Chinese Academy of Sciences Youth Innovation Promotion Association grant(2021220).
文摘The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision.The main problems of fabricating large-aperture and high-precision grating by this technique are the high-precision displacement measurement of the stage,the high-precision control of the interference fringe and the real time compensation of the grating phase error.In this paper,the influence of grating groove error on the wavefront aberration is analyzed.In order to improve the precision of the stage with displacement range more than one meter,an integrated displacement measurement combining grating sensing and laser interferometry is proposed,which suppresses the influence of environment on measurement precision under long displacement range.An interference fringe measurement method is proposed,which combines the diffraction characteristics of the measuring grating with the phase-shifting algorithm.By controlling the direction,period and phase nonlinear errors of the interference fringe,high quality interference fringe can be obtained.Further,a dynamic phase-locking model is established by using heterodyne interferometry to compensate grating phase error caused by stage motion error in real time.A grating with the aperture of 1500mm×420mm is fabricated.The wavefront aberration reaches 0.327λ@632.8 nm and the wavefront gradient reaches 16.444 nm/cm.This research presents a novel technique for the fabrication of meter-level size and nano-level precision holographic grating,which would further promote the development of chirped pulse amplification systems,high-energy laser and ultra-high precision displacement measurement.
