摘要
对8×8元阵列锆钛酸铅(PZT)厚膜声纳换能器芯片进行了设计,对PZT铁电厚膜的微图形的刻蚀工艺及其反应机理进行了深入的研究。最后成功地刻蚀出8×8元声纳换能器图形,为进一步研制PZT厚膜声纳换能器打下了良好的基础。
The structure and the fabrication processing of ferroelectric thick film sonar transducer has been designed and systematically studied in this paper. At the same time, the micro-pattern etching techniques, the etching mechanisms of PZT films have been investigated. The 8×8 array micropattern of PZT thick film ferroelectric sonar transducer have been successfully etched, and laid solid foundations for the research and development of the high performance ferroelectric sonar transducers.
出处
《压电与声光》
CAS
CSCD
北大核心
2004年第3期196-199,共4页
Piezoelectrics & Acoustooptics
关键词
锆钛酸铅(PZT)
铁电厚膜
铁电声纳换能器
湿法化学刻蚀
lead zirconate titanate (PZT)
ferroelectric thick film
ferroelectric sonar transducer
wet chemical etching
