摘要
本文提出一种提高半导体电阻式气敏元件选择性的新方法。这种方法的基本出发点是互补反馈原理。这种新型气敏元件的结构与原有的不同,由两种不同特性的敏感体组合而成,其组合方式可以是N-N,P-P,N-P等。文中给出了有关的理论讨论和在此理论指导下制作的高选择性乙醇气敏、丁烷气敏元件的实验结果,证明此理论是正确的。
A new approach to improve the selectivity of semiconductor gas sensors is put forth. Thebase for this approach is feedback compensation principle. The structure of the new gas sensordiffers from others. It consists of two sensitive bodies and can be N-N, P-P, or N-P. Atheoretical discussion is given and the high selectivity ethanol sensor and butane sensor havebeen fabricated under the guidance of the theory put forth in this paper. It has been provedthat the theory is established.
