摘要
叙述了PVD镀膜技术的基本原理,各种PVD工艺和膜分析方法的最新进展,介绍了PVD今后的研究方向。
This paper describes the fundamentals of the film forming techniques byPVD process. The newest development of varions PVD technology and film analysis.The future devdlopments of PVD process are also introduced.
