摘要
台阶高度测量是目前新提出的国际计量比对项目之一,当前的趋势是向纳米量级精度发展并尽量扩大测量范围。在分析现状和背景的基础上,大致归类了测量台阶高度的几种光学方法,着重介绍了其中绝对干涉方案的最新进展,从测量原理、测量精度以及量程等几方面比较了它们的优缺点。在此基础上提出以可调谐半导体激光器作为光源,采用可调合成波长链法实现纳米级精度毫米级量程的台阶高度测量,详细分析了方案的原理误差,得到最后的结论。
Measurement of step height is one of the new international comparisons in nano metrology. Nowadays more extended range is required while the precision of measurement tends to be in nanograde. Several non contact optical methods are introduced in brief and the absolute distance interferometry with diode laser is emphasized herdnto. After comparing every methcd by measuring principle, resolution and measurment range, a CSWC ADI system was conceived with tumble diode laser to measure the step height in nanometer scale, and the theoretic uncertainty of the experiment was analyzed. Then the conclusion is drawn.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2006年第1期111-114,共4页
Optical Technique
关键词
可调合成波长链
台阶高度
可调谐半导体激光器
changeable synthetic wavelength chain （CSWC）
step height
tunable diode laser
