摘要
给出了石英晶体振荡法监控膜厚的基本原理 ,在相同的工艺条件下分别用光电极值法和石英晶体振荡法监控膜厚 ,对制备的增透膜的反射光谱曲线进行了比较 ,并对石英晶体振荡法的监控结果做了误差分析 结果表明 :石英晶体振荡法不仅膜厚监控精度高 ,而且能监控沉积速率 ,获得稳定的膜层折射率 。
The thickness monitoring methods of optical coatings mainly include photoelectric extremum method and quartz crystal oscillation method. The principle of coating thickness monitoring by quartz crystal oscillation is proposed Coating thickness is monitored by the two monitoring methods respectively under the same process. Influence of thickness error is analysed. In contrast with photoelectric extremum method, quartz crystal oscillation method not only has a high degree of accuracy for controlling thickness but also can monitor deposition rate, so it can get better optical performance.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2004年第5期585-588,共4页
Acta Photonica Sinica
基金
国家 8 6 3高技术计划课题的资助项目 (86 3 80 4 2 )
关键词
光学薄膜
石英晶体振荡法
光电极值法
工具因子
误差
Optical coatings
Quartz crystal oscillation
Photoelectric extremum method
Tooling factor
Error
