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面向MEMS的微型挤出成形技术 被引量:4

A microextrusion technology for micro-electro-mechanical systems
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摘要 阐述了微成形技术领域中的一种新兴技术———微型挤出成形 ,并着重介绍了一种微型后挤出机成形微齿轮的原理和相关技术 ,指出了发展面向微机电系统 (MEMS) The paper expatiates a new technology in the microforming field and it is microextrusion technology. It is introduced that the theory and correlation technology of forming microgears by a backward microextrusions. Lastly, the scientific questions and key technologies are pointed out that developing the microextrusion technology for micro electro mechanical systems (MEMS).
机构地区 大连理工大学
出处 《电加工与模具》 2004年第2期55-57,共3页 Electromachining & Mould
关键词 微型挤出 微齿轮 MEMS 微成形技术 微机电系统 icroextrusion microgear MEMS
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参考文献5

  • 1Inoue A, Zhang T, Mosumoto T. Al-La-Ni amorphous alloys with a wide supercooled liquid region. Metal. Trans, JIM 30,1989(12) :965-970
  • 2Saotome Y, Iwazaki H. Superplastic backward microextrusion of microparts for micro-electro-mechanical systems. Materials Processing Technology, 2001,119: 307 - 311
  • 3Saotome Y, Inoue A. Superplastic microforming of microstructures. In:Proceedings of the IEEE Micro Electro Mechanical Systems. Tokyo, 1994: 343 - 347
  • 4Saotome Y, Zhang T, Inoue A. Microforming of MEMS parts with amorphous alloys. In: Mat. Res. Soc. Symposium Proceedings, 1999,554: 385 - 390
  • 5SaotomeY, iwazakiH. Superplastic extrusion of microgear shaft of 10μm in module. Microsystem Technologies, 2000(6): 126 - 129

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