摘要
介绍了用MPCVD方法制备纳米金刚石膜的工艺。用MPCVD方法实验研究了在光学玻璃上镀纳米金刚石膜:膜层厚度为0 4551μm,粒度小于200nm,表面粗糙度小于29 5nm,最大透过率为80%;平均显微硬度为34 9GPa,平均体弹性模量为238 9GPa,均接近天然金刚石的力学性能。与衬底材料表面应力-2 78GPa相比,具有较好的抗压和耐磨效果。
To produce nanocrystalline diamond film coatings on glass substrate by microwave plasma chemical vapor deposition method are presented. The thickness of diamond film is 0.4551 μm, the size of particle is about 200nm, the roughness is less than 29.5nm, and the highest transparence is about 80%. The average micro stiffness is about 34.9Gpa, the average bulk elastic moudulus is about 238.9GPa, and the stress of the film is about -2.78GPa.
出处
《光学技术》
CAS
CSCD
2004年第2期184-186,共3页
Optical Technique
基金
国防科学基金资助项目
