摘要
本文利用ANSYS 软件对扩散硅力敏器件进行了力学分析，给出了不同尺寸梁—膜—岛结构的应力分布曲线以及力敏电阻灵敏度分布曲线，为力敏电阻的合理布置提供了理论依据。
By using ANSYS, the stress analysis of beam-diaphragm-island structure is introduced. The stress distributing curves as well as the sensitivity curves of the piezoresistors is presented in this paper, which provides the theoretic basis for the precise location of Wheatstone bridge.
出处
《传感器世界》
2004年第1期33-35,共3页
Sensor World
