摘要
通过对扩散硅力敏器件（ＳＤＰＳ）建模，分析了其零点温漂和灵敏度温度调制的成因，提出了一种基于电阻网络的补偿方法并系统地叙述了电阻网络的配置及参数计算公式．最后给出了一组仿真结果．
This paper analyses the characters of SDPS (Silicon Diffused Pressure Micro-Sensors) and presents a simple method of the thermal offset and pressure sensitivity error correction for SDPS based on the resistor network. The related algorithms and formulae are also,provided. Finally, some simulation results are given to evaluate this method.
出处
《武汉水利电力大学学报》
CSCD
1995年第1期52-57,共6页
Engineering Journal of Wuhan University
关键词
硅力敏器件
温度
补偿电路
计算
temperature sensitivity
compensation circuits
silicon pressure gauge
