摘要
介绍了纳米加工平台的工作原理,并对电磁力进行计算分析。根据力学方程建立了纳米加工平台的X Y方向模拟内环模型和数字外环模型,并对数模两环反馈控制进行了研究,提出了无加速度感应器的内环控制和模糊控制外环方法。仿真结果表明,该模型具有较高的动态性能和稳定性。
The principle of the nanotechnology-stage is introduced and the electromagnetic force which drives the stage is calculated and analyzed.The models of the analog inner loop and the fuzzy outer loop of the stage in X-Y direction are established according to the mechanical equations.The feedback control using the inner loop and outer loop is studied,and the method of the inner loop control with the non-acceleration sensor and the fuzzy outer loop control is proposed. The simulation results show that the models have well dynamic performance and high stability.
出处
《微细加工技术》
2003年第4期73-78,共6页
Microfabrication Technology
基金
国家自然科学基金资助项目(50275117)
关键词
纳米加工平台
电磁力
模拟内环
数字外环
PID
模糊控制
nanotechnology-stage
analog inner loop
electromagnetic field
PID
fuzzy outer loop control
