摘要
本文讨论了多功能宽离子束形成的物理过程,给出了均匀束、会聚束及球状发散束的设计原则和方法,并列举了实例和测试方法.其中球状发散束则为首次提出的.这些宽离子束均已应用于离子束直接淀积、离子束溅射淀积及离子束辅助镀膜技术等薄膜工艺,效果良好.
A broad ion beam with various shapes and dynamic characteristics is in demand for thin film technology.Our broad beam ion source can produce multi- shape ion beams,such as uniform,convergent,and spherically-divergent beam, etc. In this paper the physical process of forming versatile broad ion beams is discussed,and design principles and methods of these Beams are given.The design examples are also described.These ion beams with various shapes have been applied to a variety of thin film techniques,including ion beam sputtering deposition,ion beam direct-deposition and ion beam assisted deposition.
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
1992年第1期21-28,共8页
Journal of Xi'an Jiaotong University
关键词
离子束
离子光学
离子源
薄膜
ion beams
ion optics
ion sources and thin films
