摘要
本文简述了扫描电声显微镜的成像过程,说明了电声显微镜所具有的非破坏性亚表面剖面成像能力,显示了它在检测涂层中气孔、裂纹、异质相等缺陷和涂层层状结构等方面的应用.
Physical process of electron acoustic imaging with scanning electron acoustic microscope(SEAM) was reviewed.Its ability of imaging and detecting flaws including pore,crack,in-homogeneous phase and inter-lamellar texture in coating materials was shown in this paper.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第3期345-349,共5页
Journal of Inorganic Materials
关键词
电声显微镜
缺陷
涂层
Scanning electron acoustic microscope(SEAM)
Fpaw detection
Coating materials
