摘要
介绍了一种基于滑膜阻尼效应的新型音叉式微机械陀螺。该陀螺包括两个驱动质量块和由各自驱动质量块支撑的检测质量块 ,通过检测质量块上的栅形电极与玻璃衬底上的固定检测电极之间的电容变化实现角速度信号的检测。对陀螺进行了结构设计和分析。在陀螺芯片的制作过程中 ,解决了深反应离子刻蚀过程中的根部效应和滞后效应等问题。初步测试结果表明 ,该陀螺灵敏度和非线性度比较理想。
A novel tuning fork gyroscope, based on silicon bulk micromachining technology, was reported. The gyroscope consists of two oscillating masses each of which supports one sensitive mass with bar electrodes. The Coriolis force led by angular speed applied to the device was sensed by the differential changes of capacitances between the bar electrodes and the electrodes on the glass substrate. The damage caused by the common footing effects and lag effects in deep reactive ion etching had been improved significantly. The measurement sensitivity of the sensors and the nonlinearity are very ideal.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2004年第2期103-105,149,共4页
China Mechanical Engineering
基金
国家重点基础研究发展规划资助项目(G19990 3 3 10 1)
关键词
微机械陀螺
体微机械加工
栅形电极
滑膜阻尼
micromachined gyroscope
bulk silicon micromachining
bar electrodes
slide-film damping
