摘要
激光干涉仪和高精度位移传感器的非线性一般为1～5nm,为了对这样的非线性进行测量,必须使用高精度测量方法,并建立高精度测量装置。文中描述了高精度拍频法布里 珀罗激光干涉仪,和利用它对工业激光干涉仪的非线性进行的测量实验。测量范围大于1.3μm,测量不确定度约为2nm。
The nonlinearities of laser interferometer and precision displacement sensor are about 1 to 5 nm. Both of measuring method and equipments must be used for the nonlinearity measurement. A FabryPerot interferometer of laser by beat frequency with high accuracy and the experiments using it to industry interferometer is described. The measurement range is larger than 1.3 μm with the accuracy of 2 nm.
出处
《计量学报》
CSCD
北大核心
2003年第4期271-274,共4页
Acta Metrologica Sinica
基金
国家自然科学基金(59735120)
