摘要
设计了激光微加工系统中的运动控制系统,探讨了系统的组成、设计与实现.系统由目标值设定器、数字控制器、运动执行机构和位置检测用光栅尺构成.文中重点讨论了闭环运动控制系统中控制目标值的形成、执行机构X Y平台的模型以及运动控制的算法等问题,控制精度达2μm.
The composition, designation and realization of the movement control system of laser microprocessing are studied. Form of control setting value, operator XY table model and algorithm of movement control in closed loop control system were studied emphatically.As a result, the position control error of system is smaller than 2 μm with the grating ruler measurement being the standard.
出处
《天津工业大学学报》
CAS
2003年第5期38-41,共4页
Journal of Tiangong University
关键词
激光微加工
运动控制
X-Y平台
光栅尺
laser micro-processing
movement control
X-Y table
grating ruler
