摘要
超光滑表面抛光技术是超精密加工体系的一个重要组成部分,超光滑表面在国防和民用等领域都有着广泛的应用 文中介绍了超光滑表面的物理特征和应用,并根据抛光过程中工件与抛光盘之间的接触状态,将各种抛光方法分为直接接触、准接触和非接触3类,对每一种抛光方法作了总体的描述,详细地介绍了近年来发展的激光抛光技术和化学机械抛光技术及其超光滑表面抛光的加工机理。
Ultrasmooth surface is used widely in defense and commercial applications. Ultrasmooth surface polishing techniques are the important part in the ultraprecision machining system. Physical characteristics and applications of ultrasmooth surface were described. The polishing techniques were classified as direct contact, quasicontact and noncontact by the contact style. The corresponding polishing methods were introduced. The newly developed laser polishing technique, chemicalmechanical polishing technique, and the polishing mechanisms were discussed in detail. The measurement and evaluation of ultrasmooth surface were also introduced.
出处
《江苏大学学报（自然科学版）》
EI
CAS
2003年第5期55-59,共5页
Journal of Jiangsu University：Natural Science Edition
基金
江苏省自然科学基金资助项目(BK2002010)
关键词
抛光
超光滑表面
机理
评价
polishing mechanism
ultra-smooth surface
mechanism
evaluation
