摘要
介绍了几种典型的超精密加工表面微观形貌光学测量方法的测量原理及优缺点，评述了表面微观形貌光学测量技术的发展动态。
The measuring principles,advantages and defects of some typical optical methods for measuring microstructures of superfine surfaces are introduced.The developing situation of the optical measuring technology for surface microstructures is commented.
出处
《工具技术》
北大核心
1999年第5期32-35,共4页
Tool Engineering
关键词
表面微观形貌
光学测量
超精密加工
surface microstructure optical measurement superfine machining
