摘要
测量仪器和加工设备的定位技术需要微位移技术的支持 ,微动工作台是实现微动的重要手段。介绍研制的一台低成本的 ,基于弹性变形原理的微动工作台 ,并对工作台的特性进行了试验和分析。
Precision manufacturing industry requires higher positioning accuracy for measuring instruments and machining equipments.The technology of micro displace implemented by the micro position stage plays key role in development of high precision industry.The paper introduces a low cost micro position stage based on the elastic deformation.The performance is shown.And the characteristics of the stage is also tested and analyzed.
出处
《现代制造工程》
CSCD
北大核心
2003年第9期55-56,共2页
Modern Manufacturing Engineering
