摘要
为了解决微位移技术中大行程和高分辨率间的矛盾，研制了柔性框架式爬行驱动器，简化了微动工作台的驱动装置。其行程达到毫米级，仍保持较高的分辨率。具体介绍微动工作台的结构和工作原理，柔性框架设计基本模型，电致伸缩微位移器特性分析，爬行驱动器特性分析。
To resolve the conflict between large travel and high reso lution in incrodisplacement technology the flexible frame type creep ing driver is developed. The driver simplified the driving device of the micromotion bench. Its travel reached micro meter level and kept higher resolution. The strucure and operational principle of the mi cromotion bench, the basic model of the flexible frame design. the characteristic analysis of electroexpansion and the characteristic analy sis of creeping driver are introduced concretely.
出处
《自动化仪表》
CAS
北大核心
2000年第2期16-18,共3页
Process Automation Instrumentation
