摘要
国外对压电线性马达的研究已经进行了有些年了,并已有较为成熟的应用。它利用压电陶瓷基片或薄膜、电致伸缩材料等功能部件实现驱动,主要特征是能够提供较大的横向输出力,同时,又可能实现超高精度和小位移——毫米级的位移行程和原子级的精度。一般用空载速度、最大推进力、效率及其他一些参数来表征压电线性马达。该文首先介绍几种类型的压电线性马达,包括它们的结构、运行原理和特性等,然后再介绍纳米马达。应该指出,纳米马达是压电线性马达的发展,其特点是能够实现纳米级精度的位移,国外已经在精密仪器、航天航空、自动控制、办公自动化、微型机械系统、微装配、纳米定位等领域得到了实际应用。
The piezoelectric linear motor has been studied for several years abroad,and has been applied in many fields. Its driving is realized with functional elements such as bulk or film piezoelectric ceramics or electrostrictive material. The primary character is to provide large horizontal force, and may unify some requirements that are extremely high precision, the smallest positioner of this kind with millimeters and atom precision. In general, the piezoelectric linear motor is defined by no load velocity, the maximum thrust force, efficiency and other parameters. At first, this paper introduces several kind of piezoelectric linear motors including their structure,the operating principle and characters,etc, then presents nanomotor. It is to point out that nanomotor is the tendency of piezoelectric linear motor in that nanomotor can realize displacement with nanometer precision. Such nanomotor has been used in the fields of precision instruments, aeronautics and aerospace, automatic control,administration automation,micromechanical system,microfabrication process, fine positioner,etc.
出处
《压电与声光》
CSCD
北大核心
2003年第4期295-298,共4页
Piezoelectrics & Acoustooptics
关键词
压电线性马达
纳米马达
驱动器
piezoelectric linear motor
nanomotor
actuator
