摘要
在分析压电行波马达工作原理的基础上，采用微机械加工工艺分别研制成定子和转子，并通过微组装得到了完整的微机械压电马达。马达定子、转子的尺寸均为２ｍｍ。初步实验表明，在小于１０伏交流信号激励下，马达旋转转速可达到约５０ｒｐｍ。
おy analyzing the operation principle of the travelingwave piezoelectric motors, micro stators and rotators had been fabricated by the traditional microelectronic technology and micromachining technology, respectively. Meantime, the micromotors had been obtained by microassembly. The diameter of the microrotator and stator is 2mm. The preliminary experiments show that the rotation speed is about 50rpm under 10V alternative driving signal.
出处
《功能材料与器件学报》
CAS
CSCD
1998年第2期78-82,共5页
Journal of Functional Materials and Devices
基金
国家攀登计划B"微电子机械系统"资助项目
关键词
微机械加工
定子
转子
压电行波马达
Micromachining, Rotator, Stator, Piezoelectric travelingwave motor
