摘要
概述了国内IC产业现状、发展前景及其专用设备现状与发展前景,针对我国IC专用设备的现状,提出了发展国产IC专用设备和攻占市场主导地位的几点建议。
Summarizes the present situation and development prospect of domestic IC industryand its production equipment, in view of the present situation of our domestic IC productionequipment, make several suggestions for developing domestic IC production equipment and acquir-ing the leading position of IC production equipment.
出处
《半导体技术》
CAS
CSCD
北大核心
2003年第9期13-17,共5页
Semiconductor Technology
关键词
中国
IC产业
现状
发展前景
专用设备
投资规模
电子信息产业
IC Industry
IC Production Equipment Industry
Present Situation
DevelopmentProspect
Suggestions
