摘要
文章主要讨论了微机电微波/射频开关的原理、制备工艺和特性测试。微机电接触式微波/射频开关的关键结构是悬臂梁,当控制电压大于吸合电压时,悬臂梁发生吸合,使开关导通。考虑到微机电制备工艺的兼容性,选择PECVD生长的氮化硅作悬臂梁,聚酰亚胺作牺牲层。测试结果表明,研制的微机电开关在0.5～5GHz的范围内插入损耗为2dB,隔离度达30～50dB。
The mechanical principle,fabrication process and characterization of the microelectromechanical MW/RF switch are presented in the paper The fundamental structure of the switch is the cantilever When the voltage between electrodes is larger than a critical value,the cantilever will contact with the lower electrode,which will turn the switch on In consideration of the process compatibility,PECVD Si nitride is used as the support cantilever and the polyimide as a sacrificial film Characterization shows that the fabricated switch has an insert loss of 2 dB in the frequency range of 05～5 GHz,and its isolation is 30～50 dB
出处
《微电子学》
CAS
CSCD
北大核心
2003年第4期273-275,共3页
Microelectronics
基金
国家"973"项目(G1999033105)
上海市AM基金(9810)共同资助
