摘要
扭转微镜中的静电和机械两个物理场是非线性耦合的,因此系统的数学模型及动态特性分析就变得很复杂。首先建立了扭转微镜的非线性动力学模型,然后采用直接积分法求解了系统的阶跃响应,通过数值模拟发现系统的固有频率随施加电压增大而减小、振动平衡位置随电压增大发生偏移等现象。对这些非线性现象进行了分析,有助于微镜系统设计和扩展微镜系统的应用范围。
The mathematical modeling and dynamic analysis of a torsional micromirror is very complicated by the fact that there are two physical domains, electrical and mechanical, with nonlinear coupling between them. In this paper, a nonlinear dynamic model that governs the dynamic properties of a torsional micromirror is derived based on the parallel-plate capacitor model. The step response of the micromirror is analysed using direct integral method. From the numerical simulation, various nonlinear phenomena are observed. The natural frequency is reduced with increase of applied voltage, and the larger the voltage applied, the further the equilibrium position of dynamic responses. The study of these phenomena is helpful to design MEMS electrostatic torsional device systems and extend their applications.
出处
《振动工程学报》
EI
CSCD
北大核心
2004年第4期449-452,共4页
Journal of Vibration Engineering
关键词
扭转微镜
动态特性分析
阶跃响应
系统设计
扩展
动力学模型
电压
非线性现象
直接积分法
求解
Computer simulation
Dynamic response
Mathematical models
Microelectromechanical devices
Nonlinear systems
Numerical methods
Vibrations (mechanical)
